In this paper, The brand new lapping slurry and polishing slurry are launched. And the deliquescence degree of CLBO is fallen to most affordable. A different Operating technological innovation is usually adopted. After rough sharpening, the focus of extremely-precision sharpening slurry is greater thoroughly. So does the extremely-precision sharpening pace, along with the wiping pace is faster as opposed to deliquescence velocity. The CLBO crystal area roughness can realize 1nm and retain the surface area high quality nicely. Obtain by your establishment
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We summarized The present improvement position in the high-electric power DUV laser the two at the wavelength of FHG with the 1-μm laser and at 193 nm. The modern development on the solid-condition/fiber laser, as well as the nonlinear optical crystals, prompts not merely the average electric power but also the beam top quality (coherence) with the DUV lasers to an unparalleled level.
The key issue of ultraviolet coherent mild source mostly focuses on the development of nonlinear optical frequency conversion crystal in ultraviolet band. The nonlinear optical crystal is one of the circumstances for frequency transformation, so the growth, size, damage resistance, conversion performance and allowable parameter number of nonlinear optical crystal are demanded Increasingly more.
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Because of the thermal lens outcome from the reliable-state lasers, Should the heating management is inadequate, It's not at all simple to acquire the reliable-point out laser which has a substantial power and also a higher beam excellent simultaneously. Not too long ago, with the event of The skinny disk laser and one-crystal fiber (SCF) laser, a large-electric power laser at the elemental wavelength (one μm) had been recognized with a superb beam high-quality Despite having a TEM00 method beam [4,24], which would be very good candidates for the elemental of your DUV laser technology. Another candidate for the elemental is the large-power fiber laser which might be accomplished by coherent beam blend with M2 worth under 1.
On the other facet, the ability scaling in the NIR laser is another aspect to enhance the regular electricity on the 193-nm DUV laser. A result of the lack of the significant-electricity amplification Answer with check here the NIR laser (as an example at 1553 nm), nonlinear frequency procedures like optical parameter oscillation (OPO) may very well be applied to make a wavelength converter by shifting the wavelength from one μm to the specified wavelength as well as acquiring relative higher electric power [21]. Recently, a diamond Raman laser showed its skill in achieving a large electricity and also a superior conversion efficiency at the 1st Stokes from the 1-μm laser [22,23], which implies the possibility to get utilized while in the 193-nm DUV laser era on account of its high Raman attain and enormous frequency shift.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics in the Nd:YAG basic laser wavelength. To be able to improve the damage threshold, small CLBO floor roughness, by ultra-precision machining, is necessary. Since the CLBO crystal has simple hydroscopic response and micro scratches in machining, ultra-specific machining with the CLBO crystal is actually a tough technical difficulty.
The beam profile revealed in Determine 7b shown a good beam top quality as one of several deserves of Raman laser, which would be useful to crank out a 193-nm DUV laser with a top quality beam.
The conversion efficiency from elementary NIR to DUV is from 5% to 36% based on the reported ends in Desk 1. Expanding the conversion efficiency will reduce the load on the look and set up of the fundamental laser amplifier and also the electric electricity use. A great beam excellent of the elemental laser will also contribute for the raising of your conversion efficiency together with the suitable electrical power depth on the NIR and inexperienced laser from the SHG and FHG procedure, respectively. The best conversion efficiencies from NIR to eco-friendly and inexperienced to DUV laser by utilization of CLBO crystal are 70% and about fifty%, respectively [12], which corresponds to the conversion efficiency of 35% from essential to DUV.
The event with the 193-nm laser was demonstrated by levels of SFG. To be able to scale the DUV laser electric power effectively, a fresh principle with the 193-nm DUV laser technology is introduced according to the diamond Raman laser.